磁控溅射法制备Er2O3薄膜及其力学性能研究
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作者单位:

1.四川大学物理学院;2.四川大学原子核科学与技术研究所辐射物理及技术教育部重点实验室

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O469

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国家自然科学基金(1177515)


Preparation of Er2O3 film by magnetron sputtering and its mechanical properties
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Affiliation:

1.College of Physics, Sichuan University;2.Key Laboratory for Radiation Physics and Technology of Ministry of Education, Institute of Nuclear Science and Technology, Sichuan University

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    摘要:

    金属表面纳米化可以明显的改善材料表面力学性能,并能对原子的热扩散起到促进作用. 本文尝试采用材料表面纳米化技术改善316L不锈钢金属基底与Er2O3薄膜相结合的力学性能.对316L不锈钢采用超音速微粒轰击法处理使得基体表面纳米化,之后采用磁控溅射法在表面纳米化和粗晶粒的316L不锈钢基体上沉积Er2O3薄膜并进行500 ℃和700 ℃的退火. 发现薄膜在500 ℃退火时相结构基本保持稳定,在700 ℃退火时Er2O3薄膜发生明显的单斜相向立方相的转变. 利用采用X射线衍射(XRD)、场发射扫描电子显微镜(SEM)和纳米划痕测试对薄膜和基底的结合性能评价. 结果表明,700 ℃退火后的薄膜的要比500 ℃退火后的薄膜表面裂纹更少,更平整,且证得基底纳米化会使膜基结合性能得到提高.

    Abstract:

    Surface nanocrystallization can significantly improve the surface mechanical properties of metal materials and promote the thermal diffusion of atoms. This article attempts to use surface nanotechnology to improve the mechanical properties of the combination of 316L stainless steel metal substrate and Er2O3 thin film. The supersonic particle bombardment of 316L stainless steel was used to nanometerize the surface of the substrate, and then magnetron sputtering was used to deposit an erbium oxide film on the nanometerized and coarse-grained 316L stainless steel substrate and anneal at 500 ℃ and 700 ℃. The phase structure of the thin film was basically stable when annealed at 500 ℃. The erbium oxide film undergoes an obvious monoclinic to cubic phase transition when annealed at 700 ℃. Using X-ray diffraction (XRD), field emission scanning electron microscope (SEM) and friction test to evaluate the bonding properties of the film substrate. The results show that the annealed SEM image at 700 ℃ has fewer cracks and is smoother than that at 500 ℃, and it is proved that the nanometerization of the substrate will improve the bonding performance of the film substrate.

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引用本文格式: 曹潆心,吴宝珍,杨朝明,杨恒明,罗栋威,薛锐,汪渊. 磁控溅射法制备Er2O3薄膜及其力学性能研究[J]. 四川大学学报: 自然科学版, 2022, 59: 014002.

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  • 收稿日期:2021-06-04
  • 最后修改日期:2021-07-12
  • 录用日期:2021-08-03
  • 在线发布日期: 2022-01-17
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